[mems-talk] how to protect the sidewall of a trench which is
50micron in depth
David Springer
2005-04-04
Duan
The work Michael sites does the etch using a dry gas (xenon difluoride) instead
of TMAH. If you would like to try using the XeF2 instead of the TMAH please get
in contact with me and I can arrange it. XACTIX is the overwhelming world
leader in supplying equipment for etching silicon using XeF2.
Regards
David Springer
