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MEMSnet Home: MEMS-Talk: Al thermal evoporation
Al thermal evoporation
2005-04-02
RAY
2005-04-03
Yeswanth Rao
2005-04-04
li cai
2005-04-04
Andrew Xiang
2005-04-04
Joe Lonjin
Al thermal evoporation
Joe Lonjin
2005-04-04
The amount you deposit is dependant upon the size of the boat or other
that holds the aluminum. You can deposit as much as you like by doing
repeated runs, but for a one time deposition without breaking vacuum,
you need a large source. If you are using boats, you can buy crucible
holders that mount in like a boat which give you more source material
capacity. You need to give more info on the evaporation system though.

In short yes, you can deposit however much you want, but in a single run
it will depend on your source size.

Joe Lonjin
Penn State Nanofabrication Facility

>is it posible to deposit 1 micron thick aluminium layer by thermal
>evoporation.

reply
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