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MEMSnet Home: MEMS-Talk: Acetone resist strip baths
Lift Off Resist coating in deep trenches
2005-04-04
Sachin Goyal
2005-04-05
Jacobs, Michael
Acetone resist strip baths
2005-04-05
Patrick Roman
Acetone resist strip baths
Patrick Roman
2005-04-05
Greetings MEMS group-

I am interested in any information regarding process issues, longevity, and
volatility quantification of recirculated/filtered acetone resist strip
baths.  Processing in "red" baths can be alarming.

Thanks in advance!

--
Patrick Roman, M.S.
Microsystems Engineer


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