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MEMSnet Home: MEMS-Talk: pinhole free metal film on glass substrate
pinhole free metal film on glass substrate
2005-04-05
Xin Heng
2005-04-05
Hongjun-ECE
2005-04-05
Joe Lonjin
pinhole free metal film on glass substrate
Joe Lonjin
2005-04-05
Metal adhesion to glass is normally poor. The best scenario involves an
adhesion layer of either Ti or Pt which have better adhesion. Only a few
hundred Angstoms are needed. Then deposit Al or Au and you will have a
much better film.

Joe Lonjin
Penn State Nanofabrication Facility

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