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MEMSnet Home: MEMS-Talk: RIE grass/Black Silicon/Silicon Grass
RIE grass/Black Silicon/Silicon Grass
2005-04-06
Eric Dy
2005-04-06
Shane Arthur McColman
2005-04-06
Bill Moffat
RIE grass/Black Silicon/Silicon Grass
Eric Dy
2005-04-06
Does anyone know how to remove black silicon (silicon grass) from a Si substrate
without etching away an oxide mask?  Thanks for the help.

Eric


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