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MEMSnet Home: MEMS-Talk: RIE grass/Black Silicon/Silicon Grass
RIE grass/Black Silicon/Silicon Grass
2005-04-06
Eric Dy
2005-04-06
Shane Arthur McColman
2005-04-06
Bill Moffat
RIE grass/Black Silicon/Silicon Grass
Bill Moffat
2005-04-06
Eric,
     Blck silicon residue (silicon grass) was common when we started
silylation.  You do not detail your process, pleae help us some more.
Bill Moffat


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