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MEMSnet Home: MEMS-Talk: RE: Plasma Etching With Sloped Sidewalls
RE: Plasma Etching With Sloped Sidewalls
2005-04-06
Andrew Tucker
Ga deposition on MEMS structures
2005-04-11
Robert Dean
2005-04-12
David Nemeth
RE: Plasma Etching With Sloped Sidewalls
Andrew Tucker
2005-04-06
Dear All,

I just wanted to follow up to advise that STS has developed many non-Bosch
positive profile etches that do not require cryogenic processes to etch with
a positive profile. These processes are being used in production
environments that cryogenic processes are not suited to.

Best Regards
Andrew Tucker



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