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MEMSnet Home: MEMS-Talk: LPCVD amorphous silicon
LPCVD amorphous silicon
2005-04-11
manjula raman
LPCVD amorphous silicon
manjula raman
2005-04-11
Hi
I was in need of some electrical and optical characterization data for LPCVD
amorphous silicon.I get a lot of studies on aSi:H in literature, but have not
got the same for LPCVD aSi.If anyone can send me to some papers ,it would help
my work
Thanks
Manjula
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