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MEMSnet Home: MEMS-Talk: AZ1505 process recipe
AZ1505 process recipe
2005-04-11
Yuzhu Li
AZ1505 process recipe
Yuzhu Li
2005-04-11
Hi, I am currently using AZ5214 on MJB3, I am considering using AZ1505,
who can kindly provide precess recipe: spin speed, baking Temperature and time,
exp energy (on MJB3), developer name and time. Is it very similiar to
AZ5214?


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