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MEMSnet Home: MEMS-Talk: BPR100 stripping
BPR100 stripping
2005-04-11
Louis Su
2005-04-12
Bill Moffat
BPR100 stripping
Louis Su
2005-04-11
Hi:

Does anyone have experience with stripping BPR100 negative resist with ceramic
substrates?  What kinds of fluorinated gases can I consider using with O2 to
enchance the etch rate without etching the ceramic substrate?  What is the range
for the gas flow ratio should I play with ?

Thanks!

Lou

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