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MEMSnet Home: MEMS-Talk: Help with stripping BPR100 resist
Help with stripping BPR100 resist
2005-04-11
louis su
Help with stripping BPR100 resist
louis su
2005-04-11
Does anyone have experience with stripping BPR100 negative resist with
ceramic substrates?  What kinds of fluorinated gases can I consider using
with O2 to enchance the etch rate without etching the ceramic substrate?
What is the range for the gas flow ratio should I play with ?

Thanks!

Lou

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