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MEMSnet Home: MEMS-Talk: Question with TiW Sputter Target
Question with TiW Sputter Target
2005-04-11
louis su
2005-04-12
[email protected]
2005-04-12
MT Klaus Beschorner
Question with TiW Sputter Target
louis su
2005-04-11
Hi:

Is it true that TiW and Au film stack is a better choice than CrAu when it
comes to sputtering seed layers on ceramic substrate?  Also can anyone give
me a suggestion on what % of W I should use for the TiW target If I were to
use it as an adhesion layer between ceramic and Au.

Thank you



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