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MEMSnet Home: MEMS-Talk: RE: do photoresist and polyimide survive TMAH or KOH?
RE: do photoresist and polyimide survive TMAH or KOH?
1998-02-24
Dr. Mark W. Lund
RE: do photoresist and polyimide survive TMAH or KOH?
Dr. Mark W. Lund
1998-02-24
No, typical polymers used in semiconductor
processing do not survive alkali etchants.

best regards
mark
Mark W. Lund, PhD
Director             >> Soft X-ray Web page http://www.moxtek.com<<
MOXTEK, Inc.
452 West 1260 North
Orem UT 84057       801-225-0930        FAX 801-221-1121
[email protected]

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