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MEMSnet Home: MEMS-Talk: how to do edge bead removal by hand?
how to do edge bead removal by hand?
2005-04-12
Jiang Ziling
2005-04-13
Isaac Wing Tak Chan
polish
2005-04-13
Hongjun-ECE
2005-04-12
Jobert van Eisden
2005-04-12
Kory Hall
2005-04-14
Vladimer Michael
how to do edge bead removal by hand?
Jiang Ziling
2005-04-12
hi all,

  I have been doing lithography for quite a long time but am still
confused about 'edge bead removal'. My spin-coater has to be closed
when it is spin-coating and there is edge bead on the wafers after
coating. Should I just use something like cotton bud to wipe off the
edge bead on periphery of the wafers? Or is there some clever method
of avoiding edge bead? Thanks

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