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MEMSnet Home: MEMS-Talk: Ga deposition on MEMS structures
RE: Plasma Etching With Sloped Sidewalls
2005-04-06
Andrew Tucker
Ga deposition on MEMS structures
2005-04-11
Robert Dean
2005-04-12
David Nemeth
Ga deposition on MEMS structures
David Nemeth
2005-04-12
http://www.lesker.com/newweb/menu_evapmatls.cfm?CFID=699406&CFTOKEN=51628614
§ion=matdeptab&init=skip

The Lesker website has great information about how to evaporate and sputter
stuff.

David Nemeth
Senior Engineer
Sophia Wireless, Inc.

-----Original Message-----
From: Robert Dean

I need to deposit a thin layer of Ga onto a Si MEMS device.  Does anyone
know if Ga can be E-beam deposited, since it melts around 27C?

reply
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