5 minutes of plasma power in a capacitive plasma generator.  About 1
watt per square inch Oxygen plasma.  Then press the 2 active faces
together.  Trick is uniform plama from capacitive generator.  The plasma
breaks the surface bonds.  It takes days even weeks for the surface
bonds to realign.  If you press the wafers together the surface bonds
from each wafer, bond to the other wafers disturbed bonds.  Contact me
for more information or free tests.  Bill Moffat