Hi,

I use a slow spin speed with the lid open while spraying some EBR-10 through
a syringe on the edge of the wafer. If careful, this can give you the
desired result.

regards,
Jobert van Eisden
SUNY Albany

-----Original Message-----
From: Jiang Ziling

  I have been doing lithography for quite a long time but am still confused
about 'edge bead removal'. My spin-coater has to be closed when it is
spin-coating and there is edge bead on the wafers after coating. Should I
just use something like cotton bud to wipe off the edge bead on periphery of
the wafers? Or is there some clever method of avoiding edge bead?