May I suggest you use a lift of process spin coat PR sputter NI onto the PR
than dissolve PR in acetone or similar chemistry.
This is the easiest way, and non damaging. To the wafer
Walter
www.elume.com

-----Original Message-----
From: Brent Garber [mailto:[email protected]]

Transene makes a Ni etch which they claim will not harm III-V material.
I have used it and it seems fine.  I have seen 20 to 30A of my epi
getting etched depending on what layer I'm on.