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MEMSnet Home: MEMS-Talk: Spin-On -- Lift-Off SOLO?
Spin-On -- Lift-Off SOLO?
2005-04-13
Avi Laker
2005-04-13
[email protected]
Spin-On -- Lift-Off SOLO?
[email protected]
2005-04-13
Just wondered 10 micron of SOG is interesting. The best we ever did was 3
micron double spin.
Kind regards
Dov
www.elume.com

-----Original Message-----
From: Avi Laker [mailto:[email protected]]

anyone ever done a lift-off with a spin on material where the
spin on material is what you would like to keep?
ie, use 20 microns of resist  as a mask for a
10 micron spin on glass?

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