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MEMSnet Home: MEMS-Talk: Tantullum Nitride Diffusion Barrier Testing
Tantullum Nitride Diffusion Barrier Testing
2005-04-13
PATEL JITENDRA
ICPCVD
2005-04-13
karthik malladi
Coventorware
2005-04-14
Mukund Raman
2005-04-13
Bill Moffat
2005-04-15
Richard Toftness
2005-04-15
PATEL JITENDRA
2005-04-18
PATEL JITENDRA
Tantullum Nitride Diffusion Barrier Testing
PATEL JITENDRA
2005-04-13
Hello Everyone,

I am working on TaN Diffusion Barrier film. I was wondering if anyone
has paper on testing the fim. Please give me some idea on how i can test
my barrier film.  Thank you.

Jitu


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