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MEMSnet Home: MEMS-Talk: how to do edge bead removal by hand?
how to do edge bead removal by hand?
2005-04-12
Jiang Ziling
2005-04-13
Isaac Wing Tak Chan
polish
2005-04-13
Hongjun-ECE
2005-04-12
Jobert van Eisden
2005-04-12
Kory Hall
2005-04-14
Vladimer Michael
how to do edge bead removal by hand?
Vladimer Michael
2005-04-14
Jiang Ziling-

  Edge bead removal at Carnegie Mellon was simple, but worked well.
After spinning the wafer, we soak a cotton swab with acetone and remove
the wafer.  Holding the wafer by its edge with one hand, we rub the swab
around the rim to remove the edge bead.  Re-soak the swab with acetone
as needed.
  The swabs we used were cotton on thin wooden sticks -- similar to
http://www.vendmarktech.com/storemaker/images/Cotton_Swabs.jpg .  The
technique is forgiving because if you touch the photoresist accidently,
you'll probably touch the edge where there are no features.  Take care
not to drip acetone from the swab onto the photoresist.

best,
Michael Vladimer
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