i have used the e-beam to deposit Ti/Al. your deposition rate needs to be less
than 10A/s to get a better uniformaty and adhesion.

Ali

===== Original Message From Andrew Xiang  =====
>What is a good evap or ebeam rate for depositing 1500A Al?
>Is it better to go slow or fast?1-10A/s or 50-100A/s?