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MEMSnet Home: MEMS-Talk: thermal oxide quality on heavily doped Si?
thermal oxide quality on heavily doped Si?
2005-04-14
John Chiaverini
2005-04-15
Krogmann, Florian
thermal oxide quality on heavily doped Si?
John Chiaverini
2005-04-14
I'm wondering if there are any deleterious effects on oxide quality when
the oxide is thermally grown on heavily-doped silicon (boron is the
dopant).  Does anyone have any experience with this?  My guess is that it
would be a small effect, but I want to make sure the breakdown and
dielectric properties are close to usual thermal oxide.  Any info would be
appreciated.

Thanks,
John Chiaverini

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