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MEMSnet Home: MEMS-Talk: Adhesion for Al
Adherence of Ti/Au films
2005-04-10
natacha smetana
2005-04-11
Brent Garber
2005-04-14
Jiang Ziling
2005-04-11
Wilson, Thomas
2005-04-11
Alain
Adhesion for Al
2005-04-14
Andrew Xiang
2005-04-14
Jiang Ziling
2005-04-14
Charles
2005-04-14
[email protected]
2005-04-15
Andrew Xiang
2005-04-15
Paolo Tassini
Adhesion for Al
[email protected]
2005-04-14
10000 A in one min or approx 200 A sec
Kind Regards
Walter
www.elume.com

-----Original Message-----
From: Andrew Xiang [mailto:[email protected]]

What is a good evap or ebeam rate for depositing 1500A Al?
Is it better to go slow or fast?1-10A/s or 50-100A/s?



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