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MEMSnet Home: MEMS-Talk: SU8 shrinkage
SU8 shrinkage
2005-04-15
Michael L
2005-04-18
Brubaker Chad
SU8 shrinkage
Michael L
2005-04-15
Hi Everyone,

It is well known that SU-8 shrinks during the process of crosslinking (via
baking and exposure). Does anyone know of a way to reverse shrinking or to
somehow create a residual compressive film stress?

Regards,

Michael

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