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MEMSnet Home: MEMS-Talk: Boron removal
Boron removal
2005-04-15
Michael Cooke
2005-04-15
Pierre Huet
Boron removal
Michael Cooke
2005-04-15
hi

I am trying ot remove spin on boron glaze after diffusion + drive in in oxygen.
HF seems to be giving me problems in getting a good clean surface. Any solutions
out there ?

Cheers

Mike

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