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MEMSnet Home: MEMS-Talk: omnicoat stripper and SU-8
omnicoat stripper and SU-8
2005-04-15
[email protected]
2005-04-18
Brubaker Chad
omnicoat stripper and SU-8
Brubaker Chad
2005-04-18
Marc,

The omnicoat stripper will have no effect on exposed and developed SU-8
- at that point, the SU-8 is pretty much immune to any solvent
chemistries. Basically, as long as the SU-8 processing has progressed
through the post-exposure bake (PEB) process, it will be unaffected.
However, the stripper for Omnicoat (remover PG) will also remove
unexposed SU-8, in effect becoming a developer solution. It will also
probably attack any exposed, but non-PEB SU-8 material.

Best Regards,
Chad Brubaker



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