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MEMSnet Home: MEMS-Talk: Su8-PDMS bonding question
Su8-PDMS bonding question
2005-04-19
Jiang Ziling
2005-04-19
[email protected]
2005-04-20
Vladimer Michael
Su8-PDMS bonding question
Jiang Ziling
2005-04-19
hi all,

  Does anyone have experience bonding Su-8 with PDMS? I need to know
the parameter of oxygen plasma treatment to PDMS before bonding.
Thanks.

  cheers

  Jiang Ziling

reply
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