Hi Ling

For a well controlled Cr etch I use 20g CeSO4 mixed in a solution of
110ml HNO3 and 1450ml H2O.
It etches approximately 100A/min

Best Regards
Fredrik Eriksson

-----Original Message-----
From: Ling Xia
Subject: [mems-talk] Cr wet etching

     Could anyone tell me the wet ethcing conditions for Cr films on
SiO2? Will HCL work?