Hi,
Does any one know of heaters (say a ceramic plate that is
submerged vertically in solution) that provide uniform
temperature throughout the etching solution? I am doing a
back side etch on an 8'' wafer, using a very large container
filled with TMAH, but the wafer etches differently at the
bottom and at the top. Has any one run into this problem and
figured out a solution?
Thanks!
Elena