Dear all,

I have some questions about the integration of mems sensors. If
absolute pressure sensor and
low-g tri-axis accelerometer can be integrated as one sensor. That is
to say, the sensor can gauge both pressure and acceleration at the
same time.

If the suppose can't be realize, and how can integrate the two sensors.

Here are my ideals:
1. surface micromachined
    accelerometer is fabricated above the pressure sensor
maybe the sensitivity of the sensor is bad.


2. bulk micromachined
    fabricate the sensor individually and then bond the the two
silicon sensors together
maybe there are difficultied in interconnection.

can some one give me your suggestions? thanks in advance!

sincerely,
Daven Zhou