A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: non-mechanical polishing of PMMA
non-mechanical polishing of PMMA
2005-04-20
Mielnik, Michal
2005-04-20
Mac Daily
2005-05-12
Suk Sang Chang
non-mechanical polishing of PMMA
Mielnik, Michal
2005-04-20
Dear colleagues,

I am working with micromachined (milled) PMMA microchannels. The
dimensions are typically down to 50 microns.
However, the roughness of the surfaces after machining is somewhat high.
Does anyone have an idea on how I can polish these channels? (make
smooth walls). I cannot do it mechanically due to the dimensions. So;
Is it possible to simply flush them with e.g. some solvent like toulene
or dichloromethane to obtain smoother surfaces?
Any idea on flow rates and treatment times?

Thanks in advance!

Cheers,
Michal

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
MEMS Technology Review
University Wafer
Mentor Graphics Corporation