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MEMSnet Home: MEMS-Talk: Anodic Bonding Schott AF-45 to Si
Anodic Bonding Schott AF-45 to Si
2005-04-20
Joachim Oberhammer
2005-04-20
Brubaker Chad
Anodic Bonding Schott AF-45 to Si
Joachim Oberhammer
2005-04-20
anybody having tried to anodically bond AF-45 glass wafers to Si wafers?
AF-45 is alkali-free, is it thus not suitable for anodic bonding? How does
it bond compared to Corning Pyrex 7740? I heard different opinions from
experts ...

Joachim Oberhammer, Ph.D.

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