Joe-

  I'm interested in trying your bonding method for PDMS and SU8.  Could
you please give more details about your recipe such as:

  *PDMS mixture - standard 10:1?
  *PDMS bake temperature
  *SU8 type (SU8-5, SU8-50, etc...)
  *SU8 thickness
  *SU8 developing conditions (exposure power, baking times, baking
temperatures)
  *PLASMA pressure
  *PLASMA activation of PDMS? SU8? both?
  *PLASMA duration - how long do you expose the samples?
  *BONDING contact or with pressure?
  *BONDING at ATM (room temperature?)

thanks very much,
Michael Vladimer

-----Mensaje original-----
De: [email protected] [mailto:[email protected]]
Asunto: Re: [mems-talk] Su8-PDMS bonding question

I did this recently by exposing the PDMS to plasma at 150W for
1.5-2minutes and
got a  rock solid seal. The only thing to beware of is in my case I
wanted to
develop out the SU8 that was left in the channel so that my channel had
PDMS on
3 sides and glass on the other. So I exposed the SU8 with my mask and
left it in
developer for about 20 min. Well this caused the PDMS completely shrivel
up and
peel off the glass. So if you want to develop out any SU8 left in there,
you
need to pump the developer in and wash it out quickly.