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MEMSnet Home: MEMS-Talk: kapton etching
kapton etching
2005-04-20
shailini dhru
2005-04-20
aasutosh dave
2005-04-20
Charles
kapton etching
shailini dhru
2005-04-20
Hello,
We are trying to etch the kapton, but finding difficulties. It is a selective
etching and we are using photoresist as our mask. We trid etching using KOH
solution but the etching is very slow. Could any one suggest the method of
etching the Kapton? The thickness of the Kapton film is 127um.

thanks,
UCF student

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