BOE will definitely attack Ti. You might want to switch to a plasma oxide
etch.

-Mike Martin

>>> [email protected] 04/21/05 1:55 PM >>>
Hello folks,
 I am trying to etch away 1.6 micron thick thermal
oxide using 6:1 BOE. I have a 2 micron film of
Nickel-Titanium alloy beneath the oxide, and am
concerned whether the BOE will attack that film. Does
somehow have any experience about whether BOE attacks
Ni or Ti, and if so, what are typical etch rates?