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MEMSnet Home: MEMS-Talk: The most minimum thickness of SU8 spin coating?
The most minimum thickness of SU8 spin coating?
2005-04-23
Siripon Sukuabol
2005-04-24
[email protected]
2005-04-25
Jiang Ziling
The most minimum thickness of SU8 spin coating?
Siripon Sukuabol
2005-04-23
Dear All,

Please give me your advise and lab. experiment.

What is the most minimum thickness that can get from SU-8 spin coating?

Is it possible for SU-8 thickness of 0.3um?

Thanks you all

Siripon
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