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MEMSnet Home: MEMS-Talk: growing SiO2 on top of Su8?
growing SiO2 on top of Su8?
2005-04-27
Jiang Ziling
growing SiO2 on top of Su8?
Jiang Ziling
2005-04-27
hi all,

 Does anyone have experience of growing SiO2 on top of exposed and
hardbaked Su8? I am going to do this soon and I want to know whether
SiO2 will adhere well on Su8, and any other problems that may be met
within this process. Thanks!

 cheers

 Jiang Ziling
reply
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