Dear MEMS community,
our group is currently setting up powder blasting equipment for
the micromachining of glass and silicon. My main problem at the
moment is to set up an xy translation system to scan the blast
across the target substrate and to do so in a reliable manner.
If any of you could share their
experiences about this very practical matter, that would be greatly
appreciated. Did you use motorised microscope xy stages or some
other mechanism ? How did you protect the mechanical system
from clogging and abrasion by stray powder ?
I've found it difficult to find information about this in the
literature, so I'm looking forward to your replies.
Thank you very much and good luck with your research!

Regards,
Chris