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MEMSnet Home: MEMS-Talk: spinning on thin layer of PDMS
spinning on thin layer of PDMS
2005-04-29
Shramik Sengupta
2005-04-29
Andrew
2005-04-29
Gary
spinning on thin layer of PDMS
Shramik Sengupta
2005-04-29
Hi there folks...

I have a question with regard to spinnning on thin (~10 micron) layer of
PDMS.

I have previously spun on layers ~100 micron thick. But I recall that even
that required fairly high RPMs on a standard spin coater. I also came
across some article that mentioned that using 8000 RPM to obtain 40 micron
thick layers.

I wonder if any of you have been able to spin on the thicknesses that I am
looking for (~ 10 micron). Does making modifications like using high
temperatures and/or certain solvents help ?

Also, since we are looking to create (what essentially boils down to) a
very thin shim around an area of interest, we are also open to using other
materials - provided they can be bonded to another similar surface. I'd
welcome any suggestion on this point, too.

Thanks in advance

Sincerely
~Shramik Sengupta

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