Nik,

Cr of course is also a standard adhesion layer between Si and Au.

Thomas Wilson
Marshall University - COS
Huntington, WV  25755
USA

-----Original Message-----
From: Nik Dee
Subject: [mems-talk] Silicon etching

I use Chlorobenzene (4-5 minutes) after S1813 exposure and before development
just like you have suggested. It looks like the Chlorobenzene I used was
contaminated because I repeated the experiment with a new batch of
Chlorobenzene and it seemed ok.
Another problem is that there is no good adhesion of gold (evaporated gold
around 500 nm) on the silicon surface. maybe Titanium first?