Dear Elena,
           My name is Carlo Webster. I work for Brewer Science in Europe. If
you are gaining pinholes in the substrate it means you are not curing the
ProTEK for long enough. The pin holes occur when solvent remains trapped in
the ProTEK material. From here the KOH will attack the remaining solvent
causing pin holes.

Please feel to contact me directly via my address for further information @
[email protected]

Kind Regards

Carlo
> Could any one give some tips on using ProTEK from Brewer
> Science? I am depositing it on TEOS and on nitride. I get
> pin holes in it and TMAH gets into them and etches the
> wafer. Also, sometimes it peels off. I'd very much
> appreciate advice.
> Thanks,
> Elena