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MEMSnet Home: MEMS-Talk: Current limit in MUMPS
Current limit in MUMPS
2005-06-03
Behraad Bahreyni
Current limit in MUMPS
Behraad Bahreyni
2005-06-03
Hi,

   Does anybody know of a safe current limit for beams made from
different layers in MUMPS (e.g., a 100x2um^2 beam from poly1, poly2, or
the metal layer). I want to know how much current can continuously flow
through such beams with no thermal fatigue or oxidation effects,
specifically for released beams.

   Thanks,
   Behraad
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