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MEMSnet Home: MEMS-Talk: vertical resist sidewall Shipley S1813
vertical resist sidewall Shipley S1813
2005-06-03
Matthieu Nannini
vertical resist sidewall Shipley S1813
Matthieu Nannini
2005-06-03
Does any one has reach 90°C sidewall using S1813 Shipley photoresist and
a broadband contact illuminator ?

Matthieu Nannini
McGill Univ.
Canada
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