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MEMSnet Home: MEMS-Talk: Ti Dry Etch
Ti Dry Etch
2005-06-07
[email protected]
2005-06-08
Jeyakumar Subbaroyan
2005-06-08
Steven McMaster
Ti Dry Etch
[email protected]
2005-06-07
Hi,

I am looking for a dry etch recipe for ~1800 A of Ti with the native oxide
as the top layer.

Thanks,
Vinit

reply
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