HI DANIEL
I HAVE BEEN WORKING ON NEW MICRO/NANO GRIT SAND BLASTING IT CAN BE
HELPFUL TO GET YOUR REQUIRED DIMENSIONS. IT IS THE EASIEST , FASTEST,
CHEAPEST ONE BUT U SHOULD HAVE THAT EQUIPMENT. AM TELLING YOU COX I
HAVE BEEN WORKING ON THIS.THE ETCH RATE WITH THIS PROCESS IS
800-1000micron/min
THANKQ
MALLIK

On 6/8/05, Daniel Schwaab  wrote:
> Hello
> I want to make a Pyrex or Quarz template with 100nm or smaller Lines
> (10m long).
> and I want to etch them 200nm-300nm into the Pyrex or quarz
> 1) What should I use Pyrex or Quarz?
> 2) Should I use wet or RIE etching?
> 3) If so what process could work?
> Thanks for the help
> Daniel