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MEMSnet Home: MEMS-Talk: Etching of Fe evaporation starters
Etching of Fe evaporation starters
2005-06-09
Brian Dick
Etching of Fe evaporation starters
Brian Dick
2005-06-09
Hi,

We have been having problems with our Fe slugs oxidizing post-evaporation
run.  This is probably due to their being too hot when the chamber is
vented, although effort has been made to ensure sufficient cooling.  In any
event, we are possibly finding that this oxide formation is affecting our
later growths.  Do you know of an etching solution that we can dunk our Fe
in (it's a 7cc starter) to remove this oxide?  I am presuming it is an
oxide layer -- it comes out with a rust/brown appearance.

Thanks in advance for your help.

Brian.
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