A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Glass and PDMS
Glass and PDMS
2005-06-10
[email protected]
2005-06-10
Adrian Brozell
Glass and PDMS
[email protected]
2005-06-10
Hello,

I was wondering if anyone has noticed something curious about bonding PDMS to
glass. Typically, before bonding my PDMS structure to a glass slide, I clean
the slide with acetone, IPA, DI water and then bake dry. Then I put my slide
and PDMS in O2 plasma for 10 sec at 30 W and I get rock solid bonds. But, there
were a couple instances where the slide was especially dirty, so I tried
cleaning it by itself in 02 plasma for 2-3min at 300W. When that was done, I
went through the standard bonding procedure with PDMS and found there to be no
bonding whatsoever (it was worse than before the cleaning). Apparently, the
strong plasma makes the glass "too clean" and inert to PDMS bonding.

This turned out to be a major source of trouble for me when I first tried
bonding PDMS because I was over cleaning the slides. I was wondering if anyone
else has noticed this sensitivity with glass cleaning and if there's any way
to "roughen up" the glass surface again after a slide has been cleaned.

thanks in advance,
Joe Grogan
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMS Technology Review
Process Variations in Microsystems Manufacturing
Tanner EDA by Mentor Graphics
Mentor Graphics Corporation