Hi, I am writing some patterns on glass substrate using ebeam. I used the
gold layer beneath the ~200nm PMMA resist and run a dose test, as I thought
the thickness of the gold layer might be less critical for the dose compared
to the case of with gold on top of the PMMA. Reason for doing this is that
it is kind of difficult to control the gold evaporation thickness very well
for different runnings. However, after develop, the etching of the gold
layer before the oxide etching became a problem since I have only the wet
etching option. When I rinsed my sample with water and blow dry it, the gold
layer, and also the PMMA, came up from the substrate around the pattern due
to the bad stickiness. I am wondering if there's any way of avoiding this if
I still use the gold? Or, if I switch to Aluminum instead of gold, as which
could be dry etched, would it be some difference in the dose? or I have to
do a dose test again using the Aluminum?
Thanks a lot in advance. Any suggestions would be gratefully appreciated.
Best,
Long.