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MEMSnet Home: MEMS-Talk: reg: electroplaing on 5214
reg: electroplaing on 5214
2005-06-12
Krishna Vummidi
2005-06-12
li cai
2005-06-13
ssood
reg: electroplaing on 5214
li cai
2005-06-12
Deposit thin Ti first, then Au.  After that, do plating.

Good luck.

Li

>From: "Krishna Vummidi" 
>Subject: [mems-talk] reg: electroplaing on 5214
>
>Im trying to electroplate(Au) on patterned resist (AZ 5214-IR). The problem
>i think, im facing is the resist adhesion on Au. Is it normal or does the
>electrolyte (from transene - SG-10) attacks 5214. would HMDS improve
>adhesion and help to electroplate?
reply
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